EE 515LEC - Microelectromech Systems

Intended for first-year graduate students. Silicon-based integrated MEMS promise reliable performance, miniaturization and low-cost production of sensors and actuator systems with broad applications in data storage, biomedical systems, inertial navigation, micromanipulation, optical display and microfluid jet systems. The course covers such subjects as materials properties, fabrication techniques, basic structure mechanics, sensing and actuation principles, circuit and system issues, packaging, calibration, and testing.

Credits: 3