EE 553LLB - Microelectronic Fab Lab

Students learn the theory of operation for cleanrooms as well as many pieces of equipment typically used in a cleanroom. Much of this equipment is used to manufacture traditional semiconductor devices (i.e. LEDs, lasers, transistors, solar cells) as well as many newer nanotechnologies and micro devices (i.e. MEMS, nanowires, metamaterials). Students become versed in fabrication techniques used in the microelectronics industry. Required student laboratory activities include photolithography, metals deposition, operation of clean room equipment, and some testing equipment. Also requires a report on a lab practical. Please note that this course requires payment of a $100 laboratory fee.

Credits: 3