EE 548LEC - Microeltrn Dvc Fabrctin

Fabrication technology for microelectronic devices: crystal growth, wafer fabrication and characterization, mask fabrication, photo-resist chemistry and physical properties, photo, e-beam and x-ray-lithography, diffusion doping, ion implantation, etching, , CVD, MBE, DC and RF plasma reactors, evaluation and packaging. Operation of microelectronic devices (interconnects, passive devices, and MOS devices), micro-optical devices (CDRs, etc.) and micro electromechanical devices (micro-motors, micro-mirror arrays, etc).

Credits: 3