BE 480LLB - BioMEMS Fabrication Laboratory

An introduction into design and fabrication of microelectro mechanical systems for biological and biomedical applications (BioMEMS). Goal is to introduce students to the practice of device fabrication including mask layout, photolithography, chemical etching, thin film deposition, and polymer micromolding through hands on laboratory sessions. Basic cleanroom etiquette and device metrology will also be covered.

Credits: 3

Grading
Graded (GRD)

Typically Offered:
Spring

Requisites:
Pre-Requisite: BE 305 and BE 312 and Biomedical Engineering Majors Only.